VHS-10 Oil Diffusion Pump

Brochures and specifications | 2024 | Agilent TechnologiesInstrumentation
GC/MSD, LC/MS, ICP/MS
Industries
Manufacturer
Agilent Technologies

Summary

Importance of the Topic


The ability to achieve and maintain high vacuum levels is fundamental in processes such as vacuum furnace heat treatment, thin-film coating, metallizing, and advanced analytical applications. Oil diffusion pumps, exemplified by the VHS-10 model, deliver the pumping speeds and pressure ranges required for industrial and research environments, ensuring consistent performance and system cleanliness.

Objectives and Overview


This datasheet and technical overview present the performance characteristics, design features, and application potential of the VHS-10 oil diffusion pump. The primary goal is to summarize its operational parameters, highlight its patented improvements, and demonstrate its suitability for various high-vacuum applications.

Methodology and Instrumentation


The VHS-10 pump employs a stainless steel body and flanges combined with a patented “Bulge Contour” geometry to enhance gas capture and lower operating pressures. Key design elements include a choice of standard or extended cold caps, finned boilers to increase heating surface area, and a sight glass with fill and drain assembly for fluid monitoring.
  • Pump model: VHS-10 Oil Diffusion Pump
  • Cold cap options: Standard and extended designs
  • Flange types: ASA and ISO configurations
  • Boiler design: Finned surface to prolong fluid life
  • Sight glass assembly for fluid level monitoring

Main Results and Discussion


Performance testing with DC704 fluid yields the following highlights:
  • Pumping speed: up to 3,650 L/s for air, 4,560 L/s for helium and hydrogen
  • Maximum throughput: 6.3 Torr·L/s in the operating range, 7.5 Torr·L/s at 0.01 Torr
  • Operating pressure range: from 1.7×10⁻³ Torr down to <5×10⁻⁹ Torr under full power
  • Warm-up and cool-down: approximately 15 minutes and 25 minutes, respectively
  • Backstreaming rate: <5×10⁻⁴ mg/cm²/min with standard cold cap

These results confirm the VHS-10’s ability to rapidly achieve deep vacuum and handle gas loads typical in coating and metallization systems.

Benefits and Practical Applications


The VHS-10 pump offers:
  • High pumping speeds for rapid evacuation of large volumes
  • Flexible flange and voltage options for seamless integration
  • Robust stainless steel construction for frequent cleaning and maintenance
  • Low fluid backstreaming to protect downstream processes

Common applications include vacuum furnaces, optical lens coating, electronics packaging, and protective film deposition.

Future Trends and Potential Applications


Advances in vacuum technology may incorporate smart sensors for real-time performance monitoring, alternative non-oil fluids to reduce contamination risk, and energy-efficient heater designs. Integration with digital control systems will further enhance process reproducibility and system diagnostics across research and industrial platforms.

Conclusion


The VHS-10 oil diffusion pump represents a versatile, high-performance solution for demanding vacuum applications. Its patented design features and comprehensive performance make it an ideal choice for industries requiring reliable, deep vacuum generation with minimal maintenance overhead.

Content was automatically generated from an orignal PDF document using AI and may contain inaccuracies.

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