Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air
Applications | 2013 | RestekInstrumentation
GC/MSD, Purge and Trap, GC/SQ
IndustriesEnvironmental
ManufacturerAgilent Technologies
Key wordstimeout, trimethylsilanol, time, pptv, measurements, adl, replicate, blanks, flow, standard, desorb, purge, flush, limit, bfb, canister, significance, oven, semiconductor, stable, deviation, exacts, start, group, methylsiloxane, cleanrooms, sweep, vapor, cooling, organosilicon, mdl, hexamethyldisilazane, yes, array, sample, seven, dwell, nutech, line, cryofocuser, analytical, detection, cryofocus, notes, ready, cleanroom, sampler, sim, min, scanner
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